· Silicon-based Non-Vlatile Memory for Terabit Storage · SET Logic Devices · Tera Hz level Integrated Circuits · Carbon Nanotube Nanoelectronic Devices
· Development of Ultra High Density Magneto-electronic Devices
· Development of High Speed AFM Lithography System · Research on the Dry Etching Equipment and Their Processes for Tera-bit Nanodevice Fabrication· Development of Atomic Layer Deposition Technology · Quantum Dot Formation using Atomic Image Projection Electron -beam Lithography(AIPEL)