Research
 
Tera-level Nanoelectronics

· Silicon-based Non-Vlatile Memory for Terabit Storage
·
SET Logic Devices
·
Tera Hz level Integrated Circuits
·
Carbon Nanotube Nanoelectronic Devices

Magneto-
electronics

· Development of Ultra High Density Magneto-electronic Devices

Core Technologies

· Development of High Speed AFM Lithography System
· Research on the Dry Etching Equipment and Their Processes for
  
Tera-bit Nanodevice Fabrication
· Development of Atomic Layer Deposition Technology
·
Quantum Dot Formation using Atomic Image Projection Electron
  
-beam Lithography(AIPEL)